Ultra-high Quality factor microcavities
Silica optical microcavities with quality (Q) factors above 100 million have applications throughout science and engineering. is directly related to type of silicon substrate used in the fabrication process. Dopants diffuse from the silicon into the oxide, at a rate which is dependent on the growth conditions.1These dopants can modify the refractive index, which in turn will affect the Q of the cavity.
Figure 1. left: A scanning electron micrograph of the fabricated silica microtoroid resonator. Middle: A fine scan (the forward scan direction) of the fundamental transverse mode of the microtoroid fabricated from the film with boron concentration of 1.63×1014cm-3 in silicon at 848.8nm with a dual-Lorentz fit (red). The resonance shows splitting and the quality factor of the left and right peak is 3.39×108 and 2.67×108 separately. Inset: Optical micrograph of a microtoroid coupled to tapered optical fiber during testing. Right: Measured quality factor as a function of refractive index or boron dopant concentration at three wavelengths: 630, 850 and 980nm. The Q factor decreases as the refractive index decreases and the wavelength increases.